NVS-2
Chrome sputtering equipment
NVS-2
PARAMETERS
Product heating temperature
100 ÷ 350 ° C
Quantity of sputtered products
up to 24 pcs
Quantity of ion sources
1 piece
Quantity of magnetron sources
2 pcs
Working pressure
5•10-4 Pa
Ultimate pressure in the working chamber
1•10-4 Pa
Time to achieve a working pressure
40 minutes
Cycle duration
2 hours (with heating – 4 hours)
Process
automation
Power consumption
5,5 kW
Dimensions
1320 • 750 • 2100 mm
Coating thickness
0,3÷05 μm
Weight
370 kg
Chrome sputtering equipment is designed for magnetron sputtering of metals with preliminary ion cleaning and products heating
Requirements:
• Industrial water under pressure (0.2 ÷ 0.5) MPa, flow rate - 0.3 m3 / h., temperature, max - 25 ° С;
• compressed air under pressure (0.4 ÷ 0.8) MPa;
• gaseous argon UHP under pressure (0.2 ÷ 0.4) MPa;
• gaseous nitrogen under pressure (0.1 ÷ 0.2) MPa;
• gaseous helium under pressure (0.1 ÷ 0.2) MPa;
• water drain, flow rate, min - 0.5 m3 / h.
